Charged particle optics

Our research is operating in the field of charged particle optics, which means that we manipulate beams of electrons, positrons and ions.
Our ambition is to develop improved tools to look at the microscopic world and to invent new methods to create microscopic structures, even down to nanometer size. For that purpose we advance the fundamental understanding of relevant physical phenomena such as electron emission and we design innovative, sometimes revolutionary electron- and ion beam instruments, for the future semiconductor production, as well as for the fabrication of nanostructures.

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