Facilities nanotechnology

Advanced technological infrastructure for the fabrication of nanostructures and nanodevices. Experts in techniques like high resolution e-beam lithography, focused ion beam technology, patterning with reactive plasmas, in technology for a variety of nanodevice structures and technology. High-resolution electron beam lithography. Optical lithography. Focused ion beam. Mask fabrication for optical lithography. Sputter deposition. Atomic layer deposition. Dry etching. Wet processing. Thermal processing. High resolution inspection.

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