In high-precision equipment many actuators are assembled in large motion systems which can achieve (sub-) nanometer position accuracy. Smarter actuator solutions, in which multiple degrees-of-freedom, magnetic levitation, and contactless energy transfer are integrated in one design, will improve the accuracy, the speed and the acceleration of these systems.
Research into all transient aspects of energy conversion including dynamic force and field distributions and parasitic eddy-current and hysteresis effects must be carried out to create a new generation of high-precision actuators.
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