Plasma and materials processing

The research is aimed at understanding and controlling plasma-surface interactions during plasma processing of materials by means of newly developed and advanced in situ real-time plasma- and surface diagnostics. The research projects cover the complete range of man-made non-thermonuclear plasmas, studying the elementary processes in the plasma itself as well as the reactions occurring in the interaction of a plasma with its surrounding (substrate, walls). Research also includes (plasma-based) synthesis of thin films, micro- and nanostructures and the surface science aspects related to surfaces exposed to the plasma phase (including fusion-like conditions).

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