A key trend in technology is the increased miniaturization of devices, including Micro-electro-mechanical systems, and a rapidly increasing interest for smart, multifunctional (tailor-made, hybrid) materials and structures. A major bottleneck for the large-scale (industrial) production and use of miniature devices is their cost of production and limited reliability. The devices often fail prematurely, and this is partly prohibiting their large-scale use, for instance in micro-electronics.
Industry requires accurate and reliable design and production technologies supported by accurate process simulation tools and sophisticated control strategies. Such a combined approach should elucidate integrity of (micro)-structures and processes, taking into account the scatter in material properties. The latter issue is pressing because, owing to the required functional properties, the materials used in these devices tend to be brittle. On a large scale the developed technology will be used for safety assessment of large, infrastructural civil engineering works, including dams, dykes and bridges.
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